MEMS stands for Micro-electromechanical systems. MEMS are semiconductor components used for various complex applications. MEMS sensors comprise electrical and mechanical components. on a single chip. MEMS sensors are designed to detect and measure various physical quantities such as
- acceleration
- pressure
- temperature
- motion
MEMS Sensors are used in many fields of science and technology including
- automotive
- medical
- consumer electronics
- healthcare
- aerospace
- industrial applications
- small size
- low cost
- low power consumption
- high reliability
Commonly used MEMS sensors are:
- Accelerometer
- Gyroscope
- Magnetometer
- Chemical sensor
- Gas sensor
- Optical MEMS
- Pressure sensor
- Temperature sensor
- Humidity sensor
- Microphone
- Inertial Measurement Units (IMUs) - Accelerometer + Gyro
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